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qualpack tss463 / TSS461C rev. 2 ? january 1999 1 tss463 van van controller serial interface TSS461C van van controller tss463/TSS461C van controllers 1999 january temic semiconductors is an atmel company
qualpack ts80c31x2/c32x2 2 rev. 2 ? january 1999 1. contents 1. contents.................................................................................................................... .................................... 2 2. general information ......................................................................................................... ............................ 3 3. technology information ...................................................................................................... ........................ 4 3.1 w afer p rocess t echnology ..................................................................................................................... 4 3.2 p roduct d esign ............................................................................................................................... ........... 5 3.3 p ackage t echnology ............................................................................................................................... .. 6 3.3.1 soic.300 16 leads........................................................................................................ ....................... 6 3.3.2 other available packages ................................................................................................. ................... 7 3.4 t est ............................................................................................................................... .............................. 7 3.5 d evice c ross s ection ............................................................................................................................... .8 3.6 w afer p rocess c ontrol ........................................................................................................................... 9 4. qualification ............................................................................................................... ................................ 10 4.1 c hange p rocedure ............................................................................................................................... .... 11 4.2 q ualification f low ............................................................................................................................... .... 12 4.3 w afer p rocess q ualification ................................................................................................................. 13 4.4 p ackage q ualification ............................................................................................................................. 14 4.5 d evice q ualification ............................................................................................................................... .16 4.5.1 esd and latch-up results ................................................................................................. ................. 17 4.5.2 failure mechanisms and corrective actions ................................................................................ ..... 17 4.5.3 qualification status..................................................................................................... ........................ 17 4.6 o utgoing q uality and r eliability ............................................................................................................ 18 4.6.1 aoq (average outgoing quality) ........................................................................................... ........... 18 4.6.2 efr (early failure rate)................................................................................................. ................... 19 4.6.3 lfr (latent failure rate) ................................................................................................ .................. 19 5. user information ............................................................................................................ ............................ 20 5.1 s oldering r ecommendations .................................................................................................................. 20 5.2 dry pack o rdering rules ..................................................................................................................... 20 5.3 esd caution ............................................................................................................................... ............... 20 6. environmental information ................................................................................................... .................... 21 7. other data .................................................................................................................. ................................. 22 7.1 iso9001 a pproval c ertificate ................................................................................................................ 22 7.2 d atabook r eference ............................................................................................................................... .23 7.3 a ddress r eference ............................................................................................................................... ... 23 8. revision history............................................................................................................ ............................. 24
qualpack tss463 / TSS461C rev. 2 ? january 1999 3 2. general information product name: tss463 / TSS461C function: van controllers specific features: serial interface (tss463) wafer process: z86e available plastic package types: soic16 (tss463), soic24 (TSS461C) locations: process, product development temic semiconductors nantes, france wafer plant temic semiconductors nantes, france qc responsability temic semiconductors nantes, france assembly anam, korea, philippines probe test temic semiconductors nantes, france final test gateway philippines anam korea quality assurance temic semiconductors nantes, france reliability testing temic semiconductors nantes, france failure analysis temic semiconductors nantes, france quality assurance management nantes signed..........................................................
qualpack ts80c31x2/c32x2 4 rev. 2 ? january 1999 3. technology information 3.1 wafer process technology process type (name): cmos (scmos1/2 - z86e) base material: silicon epi substrate type wafer thickness (final) 475um wafer diameter 150mm number of masks 13 gate oxide material silicon dioxide thickness 195 a polysilicon number of layers 1 thickness 3000 a metal number of layers 2 layer 1 material tin/w layer 1 thickness 600 + 5000 a layer 2 material ti/alcu layer 2 thickness 7000 a passivation material si 3 n 4 on sio2 thickness 10000 a
qualpack tss463 / TSS461C rev. 2 ? january 1999 5 3.2 product design die size (tss463) 11.15mm2 (3610m*3280m) die size (TSS461C) 8.46mm2 (3480m*2610m) logic effective channel length 0.8m gate poly width 0.8m gate poly spacing 1.2m metal 1 width 1.3um metal 1 spacing 1.5um metal 2 width 1.6um metal 2 spacing 1.6um contact size 1.0m via size 1.4m
qualpack ts80c31x2/c32x2 6 rev. 2 ? january 1999 3.3 package technology 3.3.1 soic.300 16 leads package weight 0,43 g chip separation method sawing lead frame material cu thickness 10 mils size 270*270 mils 2 lead plating electroplated sn/pb 85/15 die attach material silver epoxy type ablestick 84-1 lmisr4 wire bonding material gold diameter 33um method thermosonic molding material nitto mp8000an flammability rating ul94v-0 marking method printed ink coding example temic optional special customer marking tss463 yy mm dry packing no tube packed primary tube material antistatic pvc number per unit 47 secondary box material cardboard number per unit 1692 labelling (minimum) device type, quantity, date code, prod. code bar coding code 39 to eia-556-a
qualpack tss463 / TSS461C rev. 2 ? january 1999 7 tape packed primary tape material antistatic pvc number per unit 31 secondary box material cardboard number per unit 1116 labelling (minimum) device type, quantity, date code, prod. code bar coding code 39 to eia-556-a 3.3.2 other available packages no other package available dry packing soic 16 no soic 24 no 3.4 test probe equipement sentry 15 probe temperature 125c test equipement sentry 15 test temperature 25c, 125c(sampling)
qualpack ts80c31x2/c32x2 8 rev. 2 ? january 1999 3.5 device cross section epi substrate n - pmos nmos nn nnn n p ppp thin oxide polysilicon transversal isolation oxide planararization passivation metal 2 metal 1
qualpack tss463 / TSS461C rev. 2 ? january 1999 9 3.6 wafer process control all the inspections and controls are defined as a process step in the production management software, and are led by using a centralized spc software. pc system could be summarized as follows: - nantes : hermetic packages - subcontractors : plastic packages engineering database ph y sical - nantes : hermetic packages - s ubcontractors : plastic packages critical process parameters are identified by using f.m.e.a. and other advanced tools. those parameters are followed in real time with the spc methodology and their capability is measured and monthly reported in the operation review. for end 1997, the cpk target is the following : all parameters with cpk above 1.67 % of all parameters per cpk categories 0% 20% 40% 60% 80% 100% 1995 1996 q1- q2 97 q3- q4 97 obj. 98 >2 <2 <1.67
qualpack ts80c31x2/c32x2 10 rev. 2 ? january 1999 4. qualification product qualification wafer process qualification packa g e qualification device t yp e (design) qualification all product qualifications are split into three distinct steps as shown above. this same procedure is also used to qualify a change. before a product is released for use, it must have been manufactured using a qualified wafer and package process. before a device is released for production processing, it must also have successfully completed its required specific qualification. the standard tests which are used for this procedure are shown in the section "qualification flow"
qualpack tss463 / TSS461C rev. 2 ? january 1999 11 4.1 change procedure all changes are controlled by ecn (engineering change notice). all major changes are notified to those customers using products which are affected by the change. a major change is defined as a change which affects the electrical and/or mechanical specification as defined in the datasheet or which affects the following parameters as defined hereafter: 1 general major changes 1-1 manufacturing line 1-2 sequence of fabrication process cycle 1-3 material 1-4 electrical parameter 1-5 dimension 1-6 pad location 1-7 die size 2 changes specific to wafer fabrication area 2-1 doping process 2-2 gate oxide formation method 2-3 equipement change 2-4 layer thickness 2-5 module dimensions 3 changes specific to to assembly process area 3-1 sawing process 3-2 die attach process 3-3 wire interconnect method 3-4 molding process 3-5 tinning process 4 changes specific to test area 4-1 specification limit 4-2 test coverage reduction 4-3 product identification 4-4 final conditioning
qualpack ts80c31x2/c32x2 12 rev. 2 ? january 1999 4.2 qualification flow general requirements for plastic packaged cmos ic standard test description qualification type (acceptance) mil-std 883d method 1005 electrical life test (early failure rate) 12 hours 150c (tj) 5.75v device (1/2000 12h) mil-std 883d method 1005 electrical life test (latent failure rate) 1000 hours 150c 5.75v dynamic or static device (0/116 500h) mil-std 883d method 3015.7 electrostatic discharge hbm +/-2000v 1.5kohm/100pf/3 pulses device (0/3 per level) jedec 17 latch up 50mw power injection 125c device (0/10) mhs paqa0046 prom dataretention high temperature storage 165c device (0/45 500h) mil-std 883d method 1010 temperature cycling 1000 cycles -65c/150c air/air device and package (0/45 500c) mhs paqa0184 pressure pot after mounting stress 168 hours 130c/85%rh device and package (0/45 168h) eia jesd22-a101 85/85 humidity test 1000 hours 85c/85%rh die and package (0/45 500h) eia jesd22-a110 hast 336 hours 130c/85%rh/5.5v device and package (0/45 168h) eia jesd22-a112 resistance to soldering heat infra red stress 220c/25s/3 times package (0/10 per class) mil-std 883d method 2003 solderability package (0/3) mil-std 883d method 2015 marking permanency package (0/3)
qualpack tss463 / TSS461C rev. 2 ? january 1999 13 4.3 wafer process qualification this section summarizes the global 1998 reliability results of the products manufactured with the same technology as the van tss463 and TSS461C (z86 processes). wafer process device types test description step result comment z86 microcontrollers and dedicated efr dynamic life test lfr dynamic life test 12h 500h 1000h 3/22888 1/1155 z86 z86 memory, asic, tss463 efr dynamic life test lfr dynamic life test efr dynamic life test lfr dynamic life test 12h 500h 1000h 12h 500h 1000h 1/5209 1/685 estimated 65 ppm 3.9 fit z86 TSS461C efr dynamic life test lfr dynamic life test 12h 500h 1000h estimated 49 ppm 2.9 fit failure mechanisms all 50% 17% 17% 17% poly silicide defect metal resistor shift bonding global all products efr dynamic life test lfr life test 12h 500h 1000h 4/28097 2/1840 165 ppm (20mm2) 10 fit (20mm2)
qualpack ts80c31x2/c32x2 14 rev. 2 ? january 1999 4.4 package qualification this section presents tss463 and TSS461C package qualification results, including additional measurements intending to fulfil q100 automotive standard requirements. lot number device type test description step result comment z21538f tss463 in so 16 (1) thermal cycles 1000c 2000c 0/45 0/45 85/85 humidity 1000h 2000h 0/45 0/45 resistance to soldeting heat level 1 level 3 1/10 0/10 1 die top delamination hast after soldering stress (with 5.5v bias) 168h 0/45 z21997a tss463 in so 16 (2) thermal cycles 500c 1000c 0/45 0/45 (3) 85/85 humidity 500h 1000h 0/45 0/45 (3) hast after soldering stress 168h sam 0/45 (3) 0/10 165c ht storage 500h 1000h 0/45 0/45 physical dimensions visual 0/5 bonding destructive tests (4) wp bs 0/30 (5) 0/30 avg=77.3 std=8.9 cpk=1.8 max=98.9 min=61.1 avg=17.4 std=1.5 cpk=2.3 max=21.1 min=14.3 resistance to soldeting heat level 1 level 2 level 5 0/10 0/10 0/10 w28184c 29c461b in so 24 (1) thermal cycles 500c 1000c 0/45 0/45 85/85 humidity 500h 1000h 0/45 0/45 hast after soldering stress 168h 0/45 z04948c TSS461C thermal cycles 500c 1000c 0/45 0/45 85/85 humidity 500h 1000h 0/45 0/45 hast after soldering stress 168h 0/45 hast 5.5v 168h 336h 0/45 0/45
qualpack tss463 / TSS461C rev. 2 ? january 1999 15 lot number device type test description step result comment z20569k hmt-65664a in so 28 (2) thermal cycles 500c 1000c 0/45 0/45 85/85 humidity 500h 1000h 2000h 0/45 0/45 0/45 resistance to soldeting heat level 1 0/10 marking permanency - 0/3 hast after soldering stress (with 5.5v bias) 168h 0/45 global all products mounting stress level 1 elect. 0/255 0 ppm climatic tests - 0/720 0 % notes: (1) sumitomo 6300 molding compound (2) nitto mp8000 molding compound (3) electrical test with quality program at 25c, 125c and -40c (4) performed on molded device opened using acid (5) no lifted ball bond, breakdown observed on wires (83%) and over the stich (17%)
qualpack ts80c31x2/c32x2 16 rev. 2 ? january 1999 4.5 device qualification this section presents tss463 and TSS461C device qualification results, including additional measurements intending to fulfil q100 automotive standard requirements. lot number device type test description step resul t comment z21538f tss463 in so 16 efr dynamic life test 12h 0/261 lfr dynamic life test 500h 1000h 0/116 0/116 z21997 tss463 in so 16 efr dynamic life test 12h 48h 0/800 0/304 lfr dynamic life test 500h 1000h 0/45 0/45 (6) w28184c 29c461b in so 24 efr dynamic life test 12h 0/298 lfr dynamic life test 500h 1000h 0/72 0/72 z04948c TSS461C in so 24 efr dynamic life test 12h 0/296 lfr dynamic life test 500h 1000h 0/78 0/78 global all products efr dynamic life test 12h 0/1655 0 ppm measured lfr dynamic life test 500h 1000h 0/311 0/311 18 fit measured notes: (6) electrical test with quality program at 25c, 125c and -40c
qualpack tss463 / TSS461C rev. 2 ? january 1999 17 4.5.1 esd and latch-up results lot number device type test description step resul t comment z21538b tss463 so 16 esd hbm model esd cdm model 3000v 4000v 4500v 5000v 1500v 0/10 1/13 0/4 3/13 0/10 class 2 leackage pin 6 leackages pin 2,6,15 class c6 (eos/esd of association) latch up vcc overstress lu power injection 10v 50mw 0/10 0/10 z19814 TSS461C dil 24.3 esd hbm model esd cdm model 3000v 4000v 1500v 0/5 3/3 0/4 class 2 leakages class c6 TSS461C latch up vcc overstress lu power injection 10v 50mw 0/10 0/10 4.5.2 failure mechanisms and corrective actions failure mechanism root cause corrective action date effect check of efficiency poly silicide defects process conditions reduce silicide temperature, increase duration nov 97 robusteness improved efr monitoring die top delamination sumitomo630 0 molding compound move to nitto mp8000 jan 98 no more moitures sensitivity pass level 1 of jesd 22 a112 4.5.3 qualification status the wafer process and the assembly are qualified and controlled by regular monitoring. the TSS461C van is full qualified since 1996 july. the tss463 van is full qualified since 1997 october. additional measurements done in 1998 and generic results demonstrate compliance of the two products to q100 automotive standard.
qualpack ts80c31x2/c32x2 18 rev. 2 ? january 1999 outgoing quality and reliability 4.5.4 aoq (average outgoing quality) the aoq is measured following 100% test by sampling outgoing product. the results of this inspection are recorded in ppm (parts per million) using the method defined in jedec 16. the figures below cover the last years for both the subject and structurally similar products. 0 50 100 150 200 year ppm 1991 1992 1993 1994 1995 1996 1997 1998 ( o bj)
qualpack tss463 / TSS461C rev. 2 ? january 1999 19 4.5.5 efr (early failure rate) the efr is measured on a sample of devices by operating them at an elevated temperature and measuring the number which fails to meet specification after 12 hours at 150c. the figure is expressed in terms of ppm. 0 200 400 600 800 1000 year ppm 1991 1992 1993 1994 1995 1996 1997 1998 ( o bj) 4.5.6 lfr (latent failure rate) the lfr is measured by operating devices at elevated temperatures for 1000 hours and measuring the failure rate. using the arrhenius law, the expected failure rate at a operating temperature of 55c is calculated using an activation energy of 0.6 ev with a confidence level of 60%. this is expressed in units per billion hours (fit). 0 20 40 60 80 100 year fit 1991 1992 1993 1994 1995 1996 1997 1998 ( o bj)
qualpack ts80c31x2/c32x2 20 rev. 2 ? january 1999 5. user information 5.1 soldering recommendations for dry packed products, t emic recommends to strictly follow the procedure described hereunder: - dry packed products must not be stored more than 1 year at 40c - 90%rh (worst storage conditions assumed) - a longer storage period is allowed taking into account the following conditions: 5 years max at 25c (+/-5c) - 50%rh - from opening of the packs, the product must be assembled within 48 hours. (worst in-process storage condition assumed: 30c - 60%rh) - if they cannot be soldered within this time period, then the pieces must be dryed at 125c for 24 hours. only one drying is allowed. - max relative humidity allowed in the bag is 20% (readable on the indicator inside the bag). if this value is reached, then the parts must be dryed at 125c for 24 hours before mounting. - for high sensitive products, the delay between pack opening and assembly is reduced to 6 hours (level 6 of jedec 22-a112). in this case, a warning printed on each pack advises the user of this restriction . 5.2 dry pack ordering rules t emic qualification procedure allows to classify products according to jedec 22-a112 and to determine the convenient conditioning for safe customer use. nevertheless, even if the product is not classified as moisture sensitive, it is possible (for example if storage conditions are not properly controlled) to order product with a dry pack. in this case the product name suffix will be ":d" or ":xd". 5.3 esd caution the user must protect components against eos and esd damages by grounding personal and workstations.
qualpack tss463 / TSS461C rev. 2 ? january 1999 21 6. environmental information the t emic environmental policy aims at: - reducing the use of harmful chemicals in its processes - reducing the content of harmful materials in its products - using re-cyclable materials wherever possible - reducing the energy content of its products as part of that plan, ozone depleting chemicals are being replaced either by temic / mhs or its sub- contractor's processes.
qualpack ts80c31x2/c32x2 22 rev. 2 ? january 1999 7. other data 7.1 iso9001 approval certificate
qualpack tss463 / TSS461C rev. 2 ? january 1999 23 7.2 databook reference direct access on the web to datasheet at: http://www.temic-semi.com select: products automotive ics multiplex ics 7.3 address reference all enquiries relating to this document should be addressed to the following: temic semiconductors bp70602 44306 nantes cedex 3 france telephone (33) 2 40 18 18 18 telefax (33) 2 40 18 19 20 or direct contact same address pascal lecuyer quality engineer telephone (33) 2 40 18 17 73 telefax (33) 2 40 18 19 00
qualpack ts80c31x2/c32x2 24 rev. 2 ? january 1999 8. revision history issue modification notice application date 0 tss463 van qualification report 1997 october 1 qualpack tss463 van 1998 february 2 qualpack tss463 and TSS461C van controllers 1999 january remarks: the information given in this document is believed to be accurate and reliable. however, no responsibility is assumed by temic for its use. no specific guarantee or warranty is implied or given by this data unless agreed in writing elsewhere. temic reserve the right to update or modify this information without notification , at any time, in the interest of providing the latest information. parts of this publication may be reproduced without special permission on the condition that our author and source are quoted and that two copies of such extracts are placed at our disposal after publication. before use of such reproduced material the user should check that the information is current. written permission must be obtained from the publisher for complete reprints or translations.

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